微纳加工技术_薄膜制备_外延技术

痛定思痛。 2023-01-08 02:08 125阅读 0赞

# 外延技术 #

外延技术也是一种特殊的CVD，外延技术生成单晶的膜，与一般的CVD不同；

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外延设备：  
石墨衬底，加热到1000℃左右；通入必要气体（反应气体，掺杂气体）；  
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外延的应用  
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